Octafluorocyclobutane
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| Names | |||
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| Preferred IUPAC name
Octafluorocyclobutane | |||
| Other names
Freon-C-318, perfluorocyclobutane
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| Identifiers | |||
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3D model (JSmol)
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| 1909266 | |||
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| 131113 | |||
PubChem CID
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| Properties | |||
| C4F8 | |||
| Molar mass | 200.03 g/mol | ||
| Appearance | colourless gas | ||
| Density | 1.637 g/cm3 at −5.8 °C (liquid) 9.97 kg/m3 at −6 °C and 1 atm (gas) | ||
| Melting point | −40.1 °C (−40.2 °F; 233.1 K) | ||
| Boiling point | −5.8 °C (21.6 °F; 267.3 K) | ||
| 0.016 vol/vol (1.013 bar and 20 °C) | |||
| Viscosity | 109e-6 Poise (1.013 bar and 0 °C) | ||
| Hazards | |||
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Template:Chembox Footer/trackingTemplate:Short description
Octafluorocyclobutane, or perfluorocyclobutane, C4F8, is an organofluorine compound which enjoys several niche applications. Octafluorocyclobutane is a colourless gas and shipped as a liquefied gas. It is the perfluorinated analogue of cyclobutane whereby all C–H bonds are replaced with C–F bonds.
Production
Octafluorocyclobutane is produced by the dimerization of tetrafluoroethylene and the reductive coupling of 1,2-dichloro-1,1,2,2-tetrafluoroethane.[1]
Properties
The critical point of octafluorocyclobutane is at 115.3 °C and 2.79 MPa.[citation needed]
Applications
In the production of semiconductor materials and devices, octafluorocyclobutane serves mainly as a passivation layer material in etching processes. Sometimes it is used as an etchant.[2][3] It has also been investigated as a refrigerant in specialised applications, as a replacement for ozone depleting chlorofluorocarbon refrigerants. Exploiting its volatility and chemical inertness, octafluorocyclobutane may be found in some aerosolized foods. It is listed by the Codex Alimentarius under number 946 (E946 for EU). It is investigated as a possible replacement for sulfur hexafluoride as a dielectric gas.
Gallery
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PFC-318 measured by the Advanced Global Atmospheric Gases Experiment (AGAGE) in the lower atmosphere (troposphere) at stations around the world. Abundances are given as pollution free monthly mean mole fractions in parts-per-trillion.
See also
References
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- ^ Page Module:Citation/CS1/styles.css has no content."Octafluorocyclobutane (RC318)". Gas Encyclopaedia. Air Liquide. Retrieved May 15, 2013.
- ^ Page Module:Citation/CS1/styles.css has no content.Metzler, Dominik; Bruce, Robert L.; Engelmann, Sebastian; Joseph, Eric A.; Oehrlein, Gottlieb S. (2014). "Fluorocarbon assisted atomic layer etching of SiO2 using cyclic Ar/C4F8 plasma". Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 32 (2): 020603. Bibcode:2014JVSTA..32b0603M. doi:10.1116/1.4843575.
