Microactuator
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A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general actuator, following standards have to be met:
- Large travel
- High precision
- Fast switching
- Low power consumption
- Power free force sustainability
For microactuator, there are two in addition
- Microstructurability
- Integrability
Principle of microactuators
The basic principle can be described as the expression for mechanical work
since an actuator is to manipulate positions and therefore force is needed. For different kind of microactuators, different physical principles are applied.
Classes of microactuators
See also
- Newton's laws
- Euler–Bernoulli beam equation
- Electrostatics
- Electromagnetism
- Piezoelectricity
- Microfluidics
- Sensors
- Nanotube nanomotor
References
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- ^ Page Module:Citation/CS1/styles.css has no content.Fujita, Hiroyuki; Toshiyoshi, Hiroshi (1998). "Micro actuators and their applications". Microelectronics Journal. 29 (9): 637–640. doi:10.1016/S0026-2692(98)00027-5.
- ^ Page Module:Citation/CS1/styles.css has no content.Wood, D.; Burdess, J. S.; Harris, A. J. (1996). "Actuators and their mechanisms in microengineering". IEE Colloquium on Actuator Technology: Current Practice and New Developments (Digest No: 1996/110): 7/1–7/3. doi:10.1049/ic:19960698.
- ^ Page Module:Citation/CS1/styles.css has no content.Ma, Z. C.; Fan, J.; Wang, H.; Chen, W.; Yang, G. Z.; Han, B. (2023). "Microfluidic Approaches for Microactuators: From Fabrication, Actuation, to Functionalization". Small. 19 (22). doi:10.1002/smll.202300469. PMID 36855777.
- ^ Page Module:Citation/CS1/styles.css has no content.Yoshida, K.; Park, J. H.; Yano, H.; Yokota, S.; Yun, S. (2005). "Study of Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid" (PDF). Sensors and Materials. 17 (3): 97–112.
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