Microoptomechanical systems
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Microoptomechanical systems (MOMS), also written as micro-optomechanical systems, are a special class of microelectromechanical systems (MEMS) which use optical and mechanical, but not electronic components.[1]
See also
- Microoptoelectromechanical systems (MOEMS)
- Nanoelectromechanical systems (NEMS)
References
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- ^ Page Module:Citation/CS1/styles.css has no content.Dragoman, D (2001). "Micro/nano-optoeletromechanical Systems". Progress in Quantum Electronics. 25 (5–6): 229–290. doi:10.1016/s0079-6727(01)00012-x. Retrieved 13 December 2024.
